Share Email Print

Proceedings Paper

Plume formation and optical breakdown on KrF excimer laser-irradiated silica glass
Author(s): Yoshizo Kawaguchi; Steve C. Langford; J. Thomas Dickinson
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

We report the onset of plume formation and optical breakdown in a synthetic silica glass under KrF excimer laser irradiation by luminescence spectroscopy and imaging. With increasing laser fluence, bright, highly localized luminescence due to plume formation appears on the luminescence image, and sharp lines due to Si atom fluorescence appear in the 200-300 nm region on the luminescence spectra. The SEM images on the laser-damaged region show typically two structures: (1) many small holes of the order of 1 micrometer suggesting localized vaporization, and (2) large craters of 10-100 micrometers due to spallation. The large craters have irregular shapes consistent with fracture often seen in amorphous materials.

Paper Details

Date Published: 29 June 2001
PDF: 8 pages
Proc. SPIE 4274, Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, (29 June 2001); doi: 10.1117/12.432517
Show Author Affiliations
Yoshizo Kawaguchi, Chugoku National Industrial Research Institute (Japan)
Steve C. Langford, Washington State Univ. (United States)
J. Thomas Dickinson, Washington State Univ. (United States)

Published in SPIE Proceedings Vol. 4274:
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI
Malcolm C. Gower; Henry Helvajian; Koji Sugioka; Jan J. Dubowski, Editor(s)

© SPIE. Terms of Use
Back to Top