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Proceedings Paper

XPS and RBS analysis of the composition and structure of barium titanate thin films to be used in DRAMs
Author(s): Daniel Hernandez Cruz; Bendida Sahouli; Amir Tork; Emile J. Knystautas; Roger A. Lessard
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Paper Abstract

We report the synthesis of polycrystalline barium titanate BaTiO3 thin films on silicon substrate prepared by sol- gel technique. The structure and composition of ferroelectric film ms have been analyzed by using x-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy. These methods provide information on the core level electronic states and the film composition. The results indicate the films have no distinctive deviation from the stoichiometry within the accuracy of both spectroscopic methods. Thus, this study of surface structure and composition of ferroelectric films could lead to a better understanding of the observed change of electrical and optical properties and to the design of improved devices such as dynamic random access memories.

Paper Details

Date Published: 4 June 2001
PDF: 5 pages
Proc. SPIE 4296, Practical Holography XV and Holographic Materials VII, (4 June 2001); doi: 10.1117/12.429465
Show Author Affiliations
Daniel Hernandez Cruz, COPL/Univ. Laval (Canada)
Bendida Sahouli, COPL/Univ. Laval (Canada)
Amir Tork, COPL/Univ. Laval (Canada)
Emile J. Knystautas, COPL/Univ. Laval (Canada)
Roger A. Lessard, COPL/Univ. Laval (Canada)

Published in SPIE Proceedings Vol. 4296:
Practical Holography XV and Holographic Materials VII
Stephen A. Benton; Sylvia H. Stevenson; T. John Trout; Sylvia H. Stevenson; T. John Trout, Editor(s)

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