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Proceedings Paper

Detectivity of thin film NTC infrared sensors
Author(s): Moon-Ho Lee; Mina Yoo; Seong-Ho Bae; Hyun-Jin Shin
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Paper Abstract

Characteristics of thin-film NTC infrared sensors fabricated by micromaching technology were studied as a function of the thickness of membrane. The overall-structure of thermal sensor has a form of Au/Ti/NTC/SiOx/(100)Si. NTC film of Mn1.5CoNi0.5O3 with 0.5 micrometers in thickness was deposited on SiOx layer (1.2 mm) by PLD (pulsed laser deposition) and annealed at 600-800 degree(s)C in air for 1h. Au (400nm)/Ti (100nm) electrode was coated on NTC film by dc sputtering. By the results of microstructural, X-ray and NTC analysis, post-annealed NTC films at 700 degree(s)C for 1h showed the best characteristics as NTC thermal sensing film. In order to reduce the thermal mass and thermal time constant of sensor, the sensing element was built-up on a thin membrane with the thickness of 20-65mm. Sensors with thin sensing membrane show the good detecting characteristics.

Paper Details

Date Published: 12 June 2001
PDF: 8 pages
Proc. SPIE 4288, Photodetectors: Materials and Devices VI, (12 June 2001); doi: 10.1117/12.429431
Show Author Affiliations
Moon-Ho Lee, Yeungnam Univ. (South Korea)
Mina Yoo, Yeungnam Univ. (South Korea)
Seong-Ho Bae, Yeungnam Univ. (South Korea)
Hyun-Jin Shin, Yeungnam Univ. (South Korea)

Published in SPIE Proceedings Vol. 4288:
Photodetectors: Materials and Devices VI
Gail J. Brown; Manijeh Razeghi, Editor(s)

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