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Proceedings Paper

Remote vapor phase processing of organic semiconductors for optoelectronic applications
Author(s): Sumant Padiyar; Li Chen; Harry Efsthadiatis; Robert E. Geer
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Paper Abstract

Commercial application of organic light-emitting materials currently employs organic thin film deposition techniques including spin-coating, dip-coating, and evaporation. Broader technologies will also benefit from such organic optoelectronic materials. Emerging applications include on- chip light sources for integrated circuit (IC) optical signal transduction, on-chip microdisplays, and on-chip visible and infrared sources for integrated microsystems (MEMS). However, to fully adapt to the so-called cluster tool platform used for closed-loop manufacturing of IC's a remote vapor phase deposition scheme is required for low molecular weight organic light-emitting materials as opposed to conventional evaporation based techniques. We report the development of a remote organic vapor phase deposition process for growing high-quality aluminum tris-hydroxyquinoline (Alq3) films. This process utilizes a remote reservoir for organic vaporization coupled with mass-flow controllers for delivery to the condensation zone. A load-lock equipped chamber, capable of 5' wafer transfer, is utilized to eliminate ambient contamination without restricting wafer loading/unloading or Alq3 material loading. Data will be presented for a design-of-experiment (DOE) statistical process optimization investigation of Alq3 thin film growth as a function of the system deposition parameters. Electrical characterization of the Alq3 films and their applicability for optoelectronic device structures are presented and discussed.

Paper Details

Date Published: 15 June 2001
PDF: 6 pages
Proc. SPIE 4279, Organic Photonic Materials and Devices III, (15 June 2001); doi: 10.1117/12.429374
Show Author Affiliations
Sumant Padiyar, SUNY/Albany (United States)
Li Chen, SUNY/Albany (United States)
Harry Efsthadiatis, SUNY/Albany (United States)
Robert E. Geer, SUNY/Albany (United States)

Published in SPIE Proceedings Vol. 4279:
Organic Photonic Materials and Devices III
Bernard Kippelen; Donal D. C. Bradley, Editor(s)

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