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Proceedings Paper

Characterization of microstructures with in-line digital micro-holo-interferometry
Author(s): Lei Xu; Xiaoyuan Peng; Jianmin Miao; Anand Krishna Asundi
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Paper Abstract

With respect to the two major challenges in micromeasurement, which are high resolution and small object size, digital micro-holo-interferometry is proposed in this paper to provide quantitative information on load-induced variations of microstructures under testing. As primarily measured properties, the obtained deflection-load relationship enables subsequent accurate determination of strain and stress. More importantly, properties of materials in the micro level, which are known different greatly from those of identical bulky ones, can be evaluated based on these experimental input data for computational simulations. Developed upon the in-line configuration and incorporated with long distance microscope, the proposed system can achieve higher imaging performance and resolution capacity. Studies demonstrate that it is capable of realizing accurate measurement to microstructures with lateral dimensions of at least 8 microns. Its applications in characterization of microstructures are experimentally investigated on a micro cantilevered beam as an example. The load-induced deflection is obtained and validated with numerical simulated results based on finite element analysis.

Paper Details

Date Published: 5 June 2001
PDF: 8 pages
Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); doi: 10.1117/12.429363
Show Author Affiliations
Lei Xu, Nanyang Technological Univ. (United States)
Xiaoyuan Peng, Nanyang Technological Univ. (United States)
Jianmin Miao, Nanyang Technological Univ. (Singapore)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)


Published in SPIE Proceedings Vol. 4275:
Metrology-based Control for Micro-Manufacturing
Kenneth W. Tobin Jr.; Fred Lakhani, Editor(s)

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