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Proceedings Paper

Absolute shape control of microcomponents using digital holography and multiwavelength contouring
Author(s): Wolfgang Osten; Soenke Seebacher; Torsten Baumbach; Werner P. O. Jueptner
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Paper Abstract

Digital Holography makes it possible to reconstruct the phase distribution of wavefields directly. By application of interferometric technics the observed interference phase contains the information about the shape of the object under test and/or its deformation after loading. These data can be used to investigate the materials' behavior of microcomponents. However, the observed mod2(pi) -interference phase must be unwrapped and the absolute phase values have to be transformed into 3D-coordinates and displacement components. To this purpose a multi-wavelength procedure was developed that avoids the complicated spatial unwrapping procedure. Moreover an adapted calibration technique is used to calculate the metrological data from the distorted phase field. In combination with special loading techniques and physical models of the loading behavior of components with beam geometry some important material parameters such as the Young's modulus, the Poisson ratio and the thermal expansion coefficient of microcomponents can be measured. The paper describes the measuring technology and shows some examples of microcomponent testing.

Paper Details

Date Published: 5 June 2001
PDF: 14 pages
Proc. SPIE 4275, Metrology-based Control for Micro-Manufacturing, (5 June 2001); doi: 10.1117/12.429350
Show Author Affiliations
Wolfgang Osten, Bremen Institute of Applied Beam Technology (Germany)
Soenke Seebacher, Bremen Institute of Applied Beam Technology (Germany)
Torsten Baumbach, Bremen Institute of Applied Beam Technology (Germany)
Werner P. O. Jueptner, Bremen Institute of Applied Beam Technology (Germany)

Published in SPIE Proceedings Vol. 4275:
Metrology-based Control for Micro-Manufacturing
Kenneth W. Tobin Jr.; Fred Lakhani, Editor(s)

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