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Proceedings Paper

Position-sensing grating interferometer for a specular object: analysis considering the aberration
Author(s): Kazuhide Kamiya; Takashi Nomura; Seiichi Okuda; Hatsuzo Tashiro; Kazuo Yoshikawa
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Paper Abstract

The generation theory of interference fringes patterns considering the aberration of the focusing lens is proposed in a position-sensing grating interferometer for a specular object. The proposed theory is based on the assumption that the deformation of the wavefront passing the interferometer is limited by the symmetry of the interferometer and that the wavefront can be expressed by Zernike polynomials. The simulation and experimental results are presented. The interference fringes pattern of the form of a barrel and a spool were obtained by the simulation. The experimental results agreed well with the simulation results.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427099
Show Author Affiliations
Kazuhide Kamiya, Toyama Prefectural Univ. (Japan)
Takashi Nomura, Toyama Prefectural Univ. (Japan)
Seiichi Okuda, Toyama Prefectural Univ. (Japan)
Hatsuzo Tashiro, Toyama Univ. (Japan)
Kazuo Yoshikawa, Toyama Univ. (Japan)

Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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