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Proceedings Paper

Step-height measurement with a two-wavelength laser diode interferometer using time-sharing sinusoidal phase modulation
Author(s): Takamasa Suzuki; Takayuki Yazawa; Osami Sasaki
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Paper Abstract

The system we propose uses two separate wavelengths to measure step height. Two laser diodes alternately modulated with a sinusoidal signal separate a like number of overlapping interference images detected by CCD camera, the phase map being obtained by a modulated LD. In this instance, the 1 micrometers step height was accurately detected.

Paper Details

Date Published: 8 May 2001
PDF: 4 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427082
Show Author Affiliations
Takamasa Suzuki, Niigata Univ. (Japan)
Takayuki Yazawa, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)

Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)

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