Modulated principles of various intensity-based sensors and their industrial applications are presented in this paper. We also presented a novel fiber optic sensor with a special construction like a spoke and the sensor was composed of a single mode emitting fiber as well as eight multimode receiving fibers. This special construction can compensate the light fluctuation and reflectivity variation of the measured surface. What's more, with the novel arrangement of the receiving fibers, it can also improve the slope impact in case of the sensor is used to measure the value of spatial height of a surface. Thus, it can be used to measure a complex surface contour with a fairly good resolution and sensitivity. The preliminary experiments were made to verify the practicability and reliability. The estimated local and vertical resolutions can reach 8 micrometers and 0.1 micrometers , respectively. This sensor system was applied to measure a MJ thread and small shoulder height. The conclusion is made that the developed sensor is suitable for complex surface shape measurement with higher speed, higher accuracy, and can be very good used in industrial application.

Date Published: 8 May 2001
PDF: 6 pages
Proc. SPIE 4416, Optical Engineering for Sensing and Nanotechnology (ICOSN 2001), (8 May 2001); doi: 10.1117/12.427002

Published in SPIE Proceedings Vol. 4416:
Optical Engineering for Sensing and Nanotechnology (ICOSN 2001)
Koichi Iwata, Editor(s)