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Proceedings Paper

New method to fabricate 3D optical structures into glass-ceramic films
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Paper Abstract

Liquid phase deposition of sol-gel method derived hybrid glass materials is utilized for fabrication of UV light deformable thin films. The hybrid glass material undergoes a surface-relief deformation when exposed to UV light. The observed deformation phenomenon is in the form of a physical expansion of the exposed areas. The maximum deformation when the material was patterned as a sinusoidal grating was 643 nm. The hybrid glass material features an index of refraction of 1.52, rms surface roughness of 2.25 +/- 0.83 nm after processing, and extinction coefficients of 1.2 10-3 micrometers -1 and 0.47 10-3 micrometers -1 at wavelengths of 633 nm and 1550 nm, respectively.

Paper Details

Date Published: 15 May 2001
PDF: 6 pages
Proc. SPIE 4284, Functional Integration of Opto-Electro-Mechanical Devices and Systems, (15 May 2001); doi: 10.1117/12.426858
Show Author Affiliations
Juha T. Rantala, VTT Electronics (Finland)
Ari H. O. Kaerkkaeinen, VTT Electronics and Optical Sciences Ctr./Univ. of Arizona (Finland)
Jussi A. Hiltunen, VTT Electronics (Finland)
Terho K. Kololuoma, VTT Electronics (Finland)
Michael R. Descour, Optical Sciences Ctr./Univ. of Arizona (United States)

Published in SPIE Proceedings Vol. 4284:
Functional Integration of Opto-Electro-Mechanical Devices and Systems
Michael R. Descour; Juha T. Rantala, Editor(s)

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