The diamond-like carbon films, deposited by direct ion beam deposition method using mixture of C₆H₁₄ and H₂ with and without silicon presence, have been investigated by Raman spectroscopy, X-ray photoelectron spectroscopy, ellipsometry, IR-visible-UV transmission, and electron paramagnetic resonance techniques. The D and G line widths and peak positions, integrated intensity ratio (I_D/I_G) in Raman spectra indicate these films being amorphous, mixture of sp² and sp³ bonds. It has been found that a-C:H films formed while increasing substrate temperature and deposition ion energy tend to be graphite-like. Increasing of hydrogen content in gas mixture made these films more polymer-like with low content of dangling bonds. Traces of silicon increase sp³/sp² ratio. The DLC films on silicon are able to greatly reduce IR reflection.

Date Published: 10 April 2001
PDF: 6 pages
Proc. SPIE 4415, Optical Organic and Inorganic Materials, (10 April 2001); doi: 10.1117/12.425504

Published in SPIE Proceedings Vol. 4415:
Optical Organic and Inorganic Materials
Steponas P. Asmontas; Jonas Gradauskas, Editor(s)