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Proceedings Paper

Preparation and characterization of excimer-laser-ablation-derived lead zirconate titanate thin films for microactuators
Author(s): Zhanjie Wang; Ryutaro Maeda; Hiroyuki Kokawa
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Paper Abstract

Ferroelectric films of lead zirconate titanate (PZT) are currently attracting attention because of the large number of potential application in micro actuators, such as micro- mirror, micro-pump and multi-probe cantilever of AFM. In this study, thin films of Pb (Zr0.52Ti0.48) O3 (PZT) 1.8 to approximately 2.0 micrometer thick on a Pt/Ti/SiO2/Si substrate were prepared by excimer laser ablation and were crystallized by subsequent annealing. Crystalline phases in the PZT films were investigated by X-ray diffraction analysis (XRD). The microstructure and composition of the films were studied by scanning electron microscopy (SEM) and electron probe microanalysis (EPMA), respectively. The effect of the Pb content of the target on electrical properties of PZT thin films was investigated. The PZT films with a well- crystallized perovskite phase were obtained by adding 20 wt % excess PbO to the target and annealing at 750 degrees Celsius for 90 min. The remanent polarization and the coercive field of this 0.8 micrometer think film were 23.6 (mu) C/cm2 and 60.0 kV/cm, while the dielectric constant and loss values measured at 1 kHz were approximately 935 and 0.04, respectively. Our results demonstrate that a few micrometers thick PZT thin films derived by laser ablation for use in micro actuators is possible.

Paper Details

Date Published: 5 April 2001
PDF: 8 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425390
Show Author Affiliations
Zhanjie Wang, Tohoku Univ. (Japan)
Ryutaro Maeda, National Institute of Advanced Industrial Science and Technology (Japan)
Hiroyuki Kokawa, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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