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Proceedings Paper

Telemetry silicon pressure sensor of LC resonance type
Author(s): SoonYoung Kim; Hak Jin Kim; J. S. Park; Sang Sik Yang
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Paper Abstract

This paper presents an implantable telemetry LC resonance-type pressure sensor to measure the cerebral ventricle pressure. The sensor consists of an inductor and a capacitor. The LC resonant circuit consists of the sensor and an external antenna coil that are coupled magnetically. The resonance frequency of the circuit decreases as the applied pressure increases the capacitance of the sensor. The sensor is designed in consideration of the biocompatibility and long lifetime for continuous monitoring of the ventricle pressure. This study is focused on the miniaturization of the sensor with a low resonance frequency and a high resolution. The sensor is simple to fabricate and small in comparison with others reported previously. The inductor is fabricated by electroplating and the variable capacitor is constructed with a flexible p+ diaphragm. Also, the deflection of the diaphragm, the variation of the capacitance and the resonance frequency are analyzed and calculated for the ventricle pressure ranging from 0 to 7 kPa.

Paper Details

Date Published: 5 April 2001
PDF: 11 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425371
Show Author Affiliations
SoonYoung Kim, Ajou Univ. (South Korea)
Hak Jin Kim, Ajou Univ. (South Korea)
J. S. Park, Ajou Univ. (South Korea)
Sang Sik Yang, Ajou Univ. (South Korea)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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