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Proceedings Paper

Application-specific design methodology for microsystems
Author(s): Oliver Nuessen; Hilmar Bolte; Dagmar Peters; St. Bechtold; Rainer Laur
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Paper Abstract

A fundamental approach to a coherent design strategy for microsystems is presented in this paper. Establishing such a concept can provide undeniable advantages concerning manpower, technical resources and development time. Prevalent design steps are discussed in detail, referring to the suggested ideas. Several microsystem applications and software tools are taken into account to illustrate the main aspects of a consistent design flow. The approach of behavioral physical modeling in combination with model based design optimization applying efficient and robust numeric methods in both fields allows pre-production optimization. Thus, overall development and redevelopment effort can be reduced significantly.

Paper Details

Date Published: 5 April 2001
PDF: 12 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425367
Show Author Affiliations
Oliver Nuessen, Univ. of Bremen (Germany)
Hilmar Bolte, Univ. of Bremen (Germany)
Dagmar Peters, Univ. of Bremen (Germany)
St. Bechtold, Univ. of Bremen (Germany)
Rainer Laur, Univ. of Bremen (Germany)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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