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Proceedings Paper

MEMSMaster: a new approach to prototype MEMS
Author(s): David Moulinier; Philippe Metsu; Marie-Pierre Brutails; Stephane Bergeon; Philippe Nachtergaele
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Paper Abstract

MEMS design environments are often FEM analysis centric. This relationship has kept MEMS design in a relative niche situation understood by experts. MEMSMaster implements a new design methodology for MEMS prototyping, based on a predefined set of parameterized elements composing dedicated libraries. It should ease access to MEMS technology to a wider audience.

Paper Details

Date Published: 5 April 2001
PDF: 10 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425365
Show Author Affiliations
David Moulinier, MEMScAP (France)
Philippe Metsu, MEMScAP (France)
Marie-Pierre Brutails, MEMScAP (France)
Stephane Bergeon, MEMScAP (France)
Philippe Nachtergaele, MEMScAP (France)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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