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Proceedings Paper

Replication of refractive micro-optomechanical components made with deep lithography with protons
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Paper Abstract

Deep Lithography with Protons (DLP) is a rapid prototyping technology for the fabrication of 3D micro-optical precision components. In this paper we will demonstrate how we made this DLP technology compatible with commercially available injection-molding and vacuum casting techniques, allowing to mass-replicate high-quality micro-optical modules at low cost. We will illustrate our technology by presenting optical characteristics of different refractive components made in optical-grade plastics such as polymethyl-methacrylate (PMMA), polycarbonate (PC) and semiconductor compatible plastics with high glass-transition temperatures such as COC.

Paper Details

Date Published: 5 April 2001
PDF: 9 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425343
Show Author Affiliations
Patrik Tuteleers, Vrije Univ. Brussel (Belgium)
Pedro Vynck, Vrije Univ. Brussel (Belgium)
Heidi Ottevaere, Vrije Univ. Brussel (Belgium)
Christof Debaes, Vrije Univ. Brussel (Belgium)
Alex Hermanne, Vrije Univ. Brussel (Belgium)
Irina P. Veretennicoff, Vrije Univ. Brussel (Belgium)
Hugo Thienpont, Vrije Univ. Brussel (Belgium)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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