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Proceedings Paper

Micromachined rf switches
Author(s): Ci Moo Song
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Paper Abstract

A micromachined and hermetically packaged rf switch with excellent performances and high reliability will be presented. Test results, future challenges for commercialization and possible applications will be addressed.

Paper Details

Date Published: 5 April 2001
PDF: 1 pages
Proc. SPIE 4408, Design, Test, Integration, and Packaging of MEMS/MOEMS 2001, (5 April 2001); doi: 10.1117/12.425336
Show Author Affiliations
Ci Moo Song, Samsung (South Korea)

Published in SPIE Proceedings Vol. 4408:
Design, Test, Integration, and Packaging of MEMS/MOEMS 2001
Bernard Courtois; Jean Michel Karam; Steven Peter Levitan; Karen W. Markus; Andrew A. O. Tay; James A. Walker, Editor(s)

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