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Proceedings Paper

Self-parking fiber and self-latching vertical mirror for fiber optical switch array
Author(s): S.C. Shen; Cheng-Tang Pan; Hwai-Pwu Chou
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Paper Abstract

The paper presents an innovative concept of self-parking ideal in v-groove and self-latching vertical mirror on the suspension diaphragm with technique out of plane fiber-optical switch arrays was fabricated. The self-parking ideal offers an integration by which the distance between optical fiber and mirror can be minimizes. The self-latching vertical mirror located on the suspension diaphragm that is supported by four cantilever beams. At first, it is achieved by bulk micromachining and is ablated by mask projection of 248 nm excimer laser. The vertical mirror structure was fabricated by thick photoresist as SU-8 through UV lithography and then sputters gold films. The fiber-optical switch solves in plane micro-optical that require large moving space, microassembly problem of fiber to mirror distance and reducing the roughness of mirror surface. In the experiment, out of plane micro-optical switch are successfully achieved by above key process. By the measurement of roughness of mirror must be less than 20 nm rms. The reflectivity of the gold films mirror by a wavelength of 1310 nm is higher than 85%. The micro-optical switch has maximum displacement 48 micrometers and switching time is below 0.4 ms with driving voltage 100 V DC.

Paper Details

Date Published: 30 April 2001
PDF: 9 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425328
Show Author Affiliations
S.C. Shen, National Tsing Hua Univ. (Taiwan)
Cheng-Tang Pan, Industrial Technology Research Institute (Taiwan)
Hwai-Pwu Chou, National Tsing Hua Univ. (Taiwan)

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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