To date, electrostatic microactuators have mostly bee simulated using tools that involve accurate but complex finite element analysis methods. When such an analysis forms part of a full electro-mechanical simulation, the quantity of computations necessary is excessively demanding whenever rapid results are required. High-level simulation of electrostatic actuation that includes closed-form expressions of the static and dynamic behaviors of the device, seems a best alternative for rapid prototyping. The work presented in this article is focused on the high-level simulation of a particular class of actuators, the wobble electrostatic micromotor. The high-level simulation of the motor and its surrounding electronics (control loop, power supply, sensory circuitry) shows aspects of its performance that cannot be seen by any other means. As in conventional electronic systems, this approach also offers a faster and cheaper way of designing and debugging system models, by exchanging Intellectual Property blocks across different designer teams.

Date Published: 30 April 2001
PDF: 12 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425319

Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)