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Proceedings Paper

Design and performance of a polysilicon surface micromachined microengine realized with arrays of asymmetrical electrothermal microactuators
Author(s): Edward S. Kolesar Jr.; Matthew D. Ruff; Simon Y. Ko; Richard J. Wilks; Jeffrey T. Howard; Peter B. Allen; Josh M. Wilken; Jorge E. Bosch
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Paper Abstract

Several microactuator technologies have recently been investigated for positioning individual elements in large-scale microelectromechanical systems (MEMS). Electrostatic, magnetostatic, piezoelectric and thermal expansion are the most common modes of microactuator operation. This research focuses on the design and experimental characterization of two types of asymmetrical MEMS electrothermal microactuators. The motivation is to present a unified description of the behavior of the electrothermal microactuator so that it can be adapted to a variety of MEMS applications.

Paper Details

Date Published: 30 April 2001
PDF: 12 pages
Proc. SPIE 4407, MEMS Design, Fabrication, Characterization, and Packaging, (30 April 2001); doi: 10.1117/12.425316
Show Author Affiliations
Edward S. Kolesar Jr., Texas Christian Univ. (United States)
Matthew D. Ruff, Texas Christian Univ. (United States)
Simon Y. Ko, Texas Christian Univ. (United States)
Richard J. Wilks, Texas Christian Univ. (United States)
Jeffrey T. Howard, Texas Christian Univ. (United States)
Peter B. Allen, Texas Christian Univ. (United States)
Josh M. Wilken, Texas Christian Univ. (United States)
Jorge E. Bosch, Texas Christian Univ. (United States)


Published in SPIE Proceedings Vol. 4407:
MEMS Design, Fabrication, Characterization, and Packaging
Uwe F. W. Behringer; Deepak G. Uttamchandani, Editor(s)

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