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Proceedings Paper

Modeling a geographically distributed MEMS fabrication network
Author(s): William L. Benard; Michael A. Huff
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Paper Abstract

Manufacturing is typically limited to fabrication of parts at a single location, with some sites assembling components from parts made elsewhere. The age of ubiquitous information transfer has made it conceivable to distribute manufacturing geographically, in order to provide access to unique manufacturing capabilities in a flexible manner. If the overhead of a distributed manufacturing network can be adequately reduced, it has the potential to make previously cost ineffective low volume and custom applications economically feasible. The MEMS-Exchange is an infrastructural service available to the domestic microelectromechanical systems community that provides an interface between MEMS designers and microfabrication facilities (academic, commercial, and government labs) which allows designers to develop and exercise custom process sequences in order to realize their devices.

Paper Details

Date Published: 20 April 2001
PDF: 8 pages
Proc. SPIE 4405, Process and Equipment Control in Microelectronic Manufacturing II, (20 April 2001); doi: 10.1117/12.425253
Show Author Affiliations
William L. Benard, Carnegie Mellon Univ. and MEMS Exchange (United States)
Michael A. Huff, MEMS Exchange (United States)

Published in SPIE Proceedings Vol. 4405:
Process and Equipment Control in Microelectronic Manufacturing II
Martin Fallon, Editor(s)

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