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Proceedings Paper

Periodic nanostructure fabrication on the semiconductor monocrystalline surface
Author(s): Vasily V. Valyavko; Vladimir P. Osipov; Alexander Mozgo
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Paper Abstract

In this work it is shown the possibility of the nano-size periodic structures forming on the surface of semiconductor monocrystals with low reflectivity by means of the intracavity laser processing. For this aim the special laser resonator has been designed, which allows to produce extremely narrow high-quality periodic surface structures, looking as equidistant parallel grooves, micro grids, systems of periodically located micro-craters, as well as nano-size structures of other form. The experiments have shown that this resonator makes it possible to fabricate such nano-size structures on the processed samples of monocrystals of germanium and silicon, which have the Fresnel reflectivity coefficient less than 40 percent.

Paper Details

Date Published: 26 April 2001
PDF: 4 pages
Proc. SPIE 4404, Lithography for Semiconductor Manufacturing II, (26 April 2001); doi: 10.1117/12.425232
Show Author Affiliations
Vasily V. Valyavko, B.I. Stepanov Institute of Physics (Belarus)
Vladimir P. Osipov, B.I. Stepanov Institute of Physics (Belarus)
Alexander Mozgo, B.I. Stepanov Institute of Physics (Belarus)

Published in SPIE Proceedings Vol. 4404:
Lithography for Semiconductor Manufacturing II
Chris A. Mack; Tom Stevenson, Editor(s)

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