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Proceedings Paper

Precise angle measurement technique for a vertical microstructure on substrate
Author(s): Hoseong Kim; Jinhwan Ko
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Paper Abstract

A novel technique that can measure the angle of a vertical microstructure with an accuracy of 0.05 degree(s) has been developed. The microstructure has a movable micromirror that is the main component of Micro-Optical Cross Connect (MOXC) that switches and couples optical signals in the optical communication networks. Since the performance of MOXC strongly depends on the angle between the vertical micromirror and the substrate, it is very important to measure the angle with high resolution better than 0.05 degree(s). In order to get the side view of the microstructure, a microscope imaging system that employs a long working distance objective lens and CCD camera has been built.

Paper Details

Date Published: 4 April 2001
PDF: 10 pages
Proc. SPIE 4301, Machine Vision Applications in Industrial Inspection IX, (4 April 2001); doi: 10.1117/12.420905
Show Author Affiliations
Hoseong Kim, Chung-Ang Univ. (South Korea)
Jinhwan Ko, Chung-Ang Univ. (South Korea)

Published in SPIE Proceedings Vol. 4301:
Machine Vision Applications in Industrial Inspection IX
Martin A. Hunt, Editor(s)

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