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Proceedings Paper

Fabrication of high-performance PZT actuators using microwave and hot-press hybrid sintering process
Author(s): Hirofumi Takahashi; Kazuaki Kato; Jinhao Qiu; Junji Tani
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Paper Abstract

It has been shown in our previous work that 28GHz microwave sintering process can improve the performances of piezoelectric actuators. The improved performances include larger output force, higher strength and larger electromechanical coupling factor. The improvement in performances is attributed to the repression of grain growth due to rapid heating and improvement of microstructure because of internal heating. The sintering time was reduced to 1/10 of the time needed for the traditional technology due to the lager power and uniform heating in the microwave sintering process. In this study, the microwave sintering process was combined with hot-press sintering process for further improvement of the performances of PZT actuators and the sintering conditions of the hybrid process were investigated. It has been confirmed that the combination of microwave and hot-press can further improve the performance of sintered PZT actuators by 30%. This process was also successfully used in the sintering of large samples.

Paper Details

Date Published: 21 March 2001
PDF: 10 pages
Proc. SPIE 4235, Smart Structures and Devices, (21 March 2001); doi: 10.1117/12.420888
Show Author Affiliations
Hirofumi Takahashi, Fuji Ceramics Corp. (Japan)
Kazuaki Kato, Fuji Ceramics Corp. (Japan)
Jinhao Qiu, Tohoku Univ. (Japan)
Junji Tani, Tohoku Univ. (Japan)

Published in SPIE Proceedings Vol. 4235:
Smart Structures and Devices
Dinesh K. Sood; Ronald Albert Lawes; Vasundara V. Varadan, Editor(s)

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