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Proceedings Paper

Fabrication of MEMS structures by laser machining
Author(s): Alexander Braun; Klaus-Peter Zimmer
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Paper Abstract

Excimer laser micromachining has emerged as an important manufacturing process for microsized mechanical and optical components. Using the projection mask technique this work presents and evaluates two new mask types capable of fabricating a variety of microstructures. The first new mask type is a combination of contour and gray scale mask made of chromium on quartz leading to an improved surface quality of the scanned polymer surface. The second new mask type is entirely made of quartz and makes use of tailored diffractive gratings which deflect parts of the originally illuminating laser beam beyond the solid angle of the used imaging system. This new type of gray scale mask has been applied in static laser ablation of polycarbonate fabricating 49 separate depth levels.

Paper Details

Date Published: 16 March 2001
PDF: 9 pages
Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418759
Show Author Affiliations
Alexander Braun, Univ. Leipzig (Germany)
Klaus-Peter Zimmer, Univ. Leipzig (Germany)

Published in SPIE Proceedings Vol. 4236:
Smart Electronics and MEMS II
Derek Abbott; Vijay K. Varadan; Karl F. Boehringer, Editor(s)

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