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Proceedings Paper

MEMS in Singapore
Author(s): Francis E.H. Tay
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Paper Abstract

Microelectromechanical Systems (MEMS) can be termed as a crossroad technology. Cross road in the sense that it is an amalgamation of various disciplines to produce a solution. Cross road also, in the sense that it is disruptive to the way that solutions used to be provided. At the crossroad, a decision needs to be made either to do things the old way or to embrace the new technology. In this paper, a review is made to the research and development of MEMS technology with potentially widespread applications in Singapore. In most cases, these are preparations to a possible acceleration of MEMS related industry in this part of the world. However, the author also noted that the transfer of MEMS technology from the laboratory to the industry is not a trivial matter. A major decision has to be made due to the high capital outlay and the high operational costs involved. Further, many production related issues such as yield and packaging have to be considered. A large number of MEMS commercial outfits such as Bosch are serving internal customers. As a small country with limited resources, Singapore places great emphasis on building up MEMS research and development activities to support future high value-added design and fabrication. In this paper, some of the MEMS activities in the national universities and institutes in Singapore are introduced, and some recent progress and development of MEMS technology in Singapore are presented.

Paper Details

Date Published: 16 March 2001
PDF: 6 pages
Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); doi: 10.1117/12.418752
Show Author Affiliations
Francis E.H. Tay, National Univ. of Singapore and Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 4236:
Smart Electronics and MEMS II
Derek Abbott; Vijay K. Varadan; Karl F. Boehringer, Editor(s)

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