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Proceedings Paper

Microarray study of temperature-dependent sensitivity and selectivity of metal/oxide sensing interfaces
Author(s): Jason Tiffany; Richard E. Cavicchi; Stephen Semancik
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Paper Abstract

Conductometric gas microsensors offer the benefits of ppm-level sensitivity, real-time data, simple interfacing to electronics hardware, and low power consumption. The type of device we have been exploring consists of a sensor film deposited on a "microhotplate"- a 100 micron platform with built-in heating (to activate reactions on the sensing surface) and thermometry. We have been using combinatorial studies of 36-element arrays to characterize the relationship between sensor film composition, operating temperature, and response, as measured by the device’s sensitivity and selectivity. Gases that have been tested on these arrays include methanol, ethanol, dichloromethane, propane, methane, acetone, benzene, hydrogen, and carbon monoxide, and are of interest in the management of environmental waste sites. These experiments compare tin oxide films modified by catalyst overlayers, and ultrathin metal seed layers. The seed layers are used as part of a chemical vapor deposition process that uses each array element’s microheater to activate the deposition of SnO2, and control its microstructure. Low coverage (2 nm) catalytic metals (Pd, Cu, Cr, In, Au) are deposited on the oxides by masked evaporation or sputtering. This presentation demonstrates the value of an array-based approach for developing film processing methods, measuring performance characteristics, and establishing reproducibility. It also illustrates how temperature-dependent response data for varied metal/oxide compositions can be used to tailor a microsensor array for a given application.

Paper Details

Date Published: 26 February 2001
PDF: 8 pages
Proc. SPIE 4205, Advanced Environmental and Chemical Sensing Technology, (26 February 2001); doi: 10.1117/12.417456
Show Author Affiliations
Jason Tiffany, National Institute of Standards and Technology (United States)
Richard E. Cavicchi, National Institute of Standards and Technology (United States)
Stephen Semancik, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 4205:
Advanced Environmental and Chemical Sensing Technology
Tuan Vo-Dinh; Stephanus Buettgenbach, Editor(s)

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