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Proceedings Paper

Microfluidics in environmental monitoring: a proposed mechanism for anisotropic wet chemical etching of c-Si
Author(s): Rob Korch; Vassili Karanassios
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Paper Abstract

In many chemical measurements, a sample must be transported from an inlet, to a measurement "cell" to a detector regardless of size of the measurement system. For micro-instruments that may be used in environmental monitoring applications, micro-fluidics provides a irreplaceable way of transporting gaseous or liquid micro-samples from inlet to outlet. Micro-channels and micro-cells can be fabricated using anisotropic wet chemical etching and crystalline Si (c-Si). Despite wide applicability ofthe approach, the mechanism of anisotropic wet chemical etching of c-Si is not well understood. In this paper, a proposed reaction mechanism for such etching is discussed in detail.

Paper Details

Date Published: 26 February 2001
PDF: 2 pages
Proc. SPIE 4205, Advanced Environmental and Chemical Sensing Technology, (26 February 2001); doi: 10.1117/12.417438
Show Author Affiliations
Rob Korch, Univ. of Waterloo (Canada)
Vassili Karanassios, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 4205:
Advanced Environmental and Chemical Sensing Technology
Tuan Vo-Dinh; Stephanus Buettgenbach, Editor(s)

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