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Proceedings Paper

Optomechanical modeling for fabrication of MEMS micromirrors
Author(s): Jeff Odhner; Daniel J. Keating; Nora Finch
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Paper Abstract

This paper will present a method for rapidly developing MEMS micro-mirrors by utilizing CAD tools currently available. Design begins with a mask layout which leads to analysis of one mirror. These results are then used to model a complete array.

Paper Details

Date Published: 6 March 2001
PDF: 8 pages
Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); doi: 10.1117/12.417339
Show Author Affiliations
Jeff Odhner, IntelliSense Corp. (United States)
Daniel J. Keating, IntelliSense Corp. (United States)
Nora Finch, IntelliSense Corp. (United States)

Published in SPIE Proceedings Vol. 4198:
Optomechanical Engineering 2000
Mark A. Kahan, Editor(s)

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