Atomic force microscope (AFM) is an invaluable measurement tool for analyzing the sub-micron and nanometer-level detail because of its ease of use, three-dimensional measurements and minimal sample preparation unlike TEM and SEM. So AFM can be used for both qualitative and quantitative information in optical storage science and technology. Its imaging can provides characterization of optical disc media with almost non-destructive. In CD-R manufacturing process, groove geometry structures of stamper, substrate and discs are very critical. In our experiments, pre-groove shape parameters (width, sidewall angle, depth and roughness) of many kinds of CD-R stampers (depth from 70 nm to 240 nm) were studied by AFM. The recorded bits on CD-R disc were observed and analyzed.

Date Published: 7 February 2001
PDF: 5 pages
Proc. SPIE 4085, Fifth International Symposium on Optical Storage (ISOS 2000), (7 February 2001); doi: 10.1117/12.416848

Published in SPIE Proceedings Vol. 4085:
Fifth International Symposium on Optical Storage (ISOS 2000)
Fuxi Gan; Lisong Hou, Editor(s)