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Proceedings Paper

Future metrology needs for FEL reflective optics
Author(s): Lahsen Assoufid
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Paper Abstract

An International Workshop on Metrology for X-ray and Neutron Optics has been held March 16-17,2000, at the Advanced Photon Source, Argonne National Laboratory near Chicago, Illinois (USA). The workshop gathered engineers and scientist from both the U.S. and around the world to evaluate the metrology instrumentation and methods used to characterize surface figure and finish for long grazing incidence optics used in beamlines at synchrotron radiation sources. This two-day workshop was motivated by the rapid evolution in the performance of x-ray and neutron sources along with requirements in optics figure and finish. More specifically, the performance of future light sources, such as free-electron laser (FEL)-based x-ray sources, is being pushed to new limits in term of both brilliance and coherence. As a consequence, tolerances on surface figure and finish of the next generation of optics are expected to become tighter. The timing of the workshop provided an excellent opportunity to study the problem, evaluate the state of the art in metrology instrumentation, and stimulate innovation on future metrology instruments and techniques to be used to characterize these optics.

Paper Details

Date Published: 25 January 2001
PDF: 5 pages
Proc. SPIE 4143, X-Ray FEL Optics and Instrumentation, (25 January 2001); doi: 10.1117/12.413685
Show Author Affiliations
Lahsen Assoufid, Argonne National Lab. (United States)

Published in SPIE Proceedings Vol. 4143:
X-Ray FEL Optics and Instrumentation
Dennis M. Mills; Horst Schulte-Schrepping; John R. Arthur, Editor(s)

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