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Proceedings Paper

Advanced microlens and color filter process technology for the high-efficiency CMOS and CCD image sensors
Author(s): Yang-Tung Fan; Chiou-Shian Peng; Cheng-Yu Chu
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Paper Abstract

New markets are emerging for digital electronic image device, especially in visual communications, PC camera, mobile/cell phone, security system, toys, vehicle image system and computer peripherals for document capture. To enable one-chip image system that image sensor is with a full digital interface, can make image capture devices in our daily lives. Adding a color filter to such image sensor in a pattern of mosaics pixel or wide stripes can make image more real and colorful. We can say 'color filter makes the life more colorful color filter is? Color filter means can filter image light source except the color with specific wavelength and transmittance that is same as color filter itself. Color filter process is coating and patterning green, red and blue (or cyan, magenta and yellow) mosaic resists onto matched pixel in image sensing array pixels. According to the signal caught from each pixel, we can figure out the environment image picture. Widely use of digital electronic camera and multimedia applications today makes the feature of color filter becoming bright. Although it has challenge but it is very worthy to develop the process of color filter. We provide the best service on shorter cycle time, excellent color quality, high and stable yield. The key issues of advanced color process have to be solved and implemented are planarization and micro-lens technology. Lost of key points of color filter process technology have to consider will also be described in this paper.

Paper Details

Date Published: 28 December 2000
PDF: 12 pages
Proc. SPIE 4115, Applications of Digital Image Processing XXIII, (28 December 2000); doi: 10.1117/12.411551
Show Author Affiliations
Yang-Tung Fan, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Chiou-Shian Peng, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)
Cheng-Yu Chu, Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan)

Published in SPIE Proceedings Vol. 4115:
Applications of Digital Image Processing XXIII
Andrew G. Tescher, Editor(s)

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