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Proceedings Paper

Corrective actions for stainless-steel-particle-related burn-in failures
Author(s): Ana Sacedon; Jesus Inarrea; Manuel Alvarez; Pilar Prieto; Jose C. Plaza; Jose L. Hernandez; Carlos Martinez; Salvador Fernandez; Pablo S. Dominguez; Jose P. Gonzalez; Manuel Larran; Carlos Mata
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Paper Abstract

Metal shorts are the second burn-in failure cause in our production line. Stainless Steel (SS) particles are found in most of the analyzed metal shorts. This work presents the corrective actions implemented to detect, prevent and correct SS particle sources in our production line. The SS particle corrective actions cover from in-line KLA-ADC detection, to hardware/process modification and new wafer backside contamination controls. The main sources are due to 1) the lack of some final point filters in some NEW/old machines; 2) damaged SS mobile pieces; 3) wafer backside contamination. The back-side contamination comes form SS hardware pieces that need to be replaced by other with SS-free surfaces; as the standard LAM-TCP APM-chick. A positive impact in the burn-in failure rate has bene seen after implementing those corrective actions.

Paper Details

Date Published: 23 August 2000
PDF: 8 pages
Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); doi: 10.1117/12.410078
Show Author Affiliations
Ana Sacedon, Lucent Technologies (Spain)
Jesus Inarrea, Lucent Technologies (Spain)
Manuel Alvarez, Lucent Technologies (Spain)
Pilar Prieto, Lucent Technologies (Spain)
Jose C. Plaza, Lucent Technologies (Spain)
Jose L. Hernandez, Lucent Technologies (Spain)
Carlos Martinez, Lucent Technologies (Spain)
Salvador Fernandez, Lucent Technologies (Spain)
Pablo S. Dominguez, Lucent Technologies (Spain)
Jose P. Gonzalez, Lucent Technologies (Spain)
Manuel Larran, Lucent Technologies (Spain)
Carlos Mata, Lucent Technologies (Spain)

Published in SPIE Proceedings Vol. 4182:
Process Control and Diagnostics
Michael L. Miller; Kaihan A. Ashtiani, Editor(s)

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