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Proceedings Paper • Open Access

Toward 100% yield understanding approach in Lucent Technologies Madrid
Author(s): Miguel Recio; Miguel Alonso Merino; Carlos Mata; Victorino Martin Santamaria; Jose Angel Ayucar; Julian Moreno; Agustin Godino; Alfonso Lorenzo; Ana Sacedon; Rosa Fernandez; Carmen Morilla; Jesus Inarrea; Manuel Alvarez; Almudena Fernandez; K. Therryl; Carlos Mateos; Gerardo Gonzalez; Sergio Cruceta; J. Castano

Paper Abstract

A wealth of advantages arise form breaking down the overall yield into yield components that are easier to work and closer to the manufacturing line environment. We present in this paper our strategy to attempt the 100 percent yield explanation on our fab and the process of building a pareto that quantifies the impact of each yield component. The most critical one, the defect related, is accounted by a set of knowledge-based automatic software tools that operate in our fab. They quantify it and break it down into the by layer, by defect size and type contributions. The step forward of communication and deployment of this yield strategy is a key topic also discussed in the paper. On our way towards the 100 percent understanding of yield we have learned how to better manage it and taken advantage of many more opportunities to improve it. The strategy has shown to work both for new and mature technologies in our manufacturing line in Lucent Technologies Madrid.

Paper Details

Date Published: 23 August 2000
PDF: 8 pages
Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); doi: 10.1117/12.410071
Show Author Affiliations
Miguel Recio, Lucent Technologies (Spain)
Miguel Alonso Merino, Lucent Technologies (Spain)
Carlos Mata, Lucent Technologies (Spain)
Victorino Martin Santamaria, Lucent Technologies (Spain)
Jose Angel Ayucar, Lucent Technologies (Spain)
Julian Moreno, Lucent Technologies (Spain)
Agustin Godino, Lucent Technologies (Spain)
Alfonso Lorenzo, Lucent Technologies (Spain)
Ana Sacedon, Lucent Technologies (Spain)
Rosa Fernandez, Lucent Technologies (Spain)
Carmen Morilla, Lucent Technologies (Spain)
Jesus Inarrea, Lucent Technologies (Spain)
Manuel Alvarez, Lucent Technologies (Spain)
Almudena Fernandez, Lucent Technologies (Spain)
K. Therryl, Lucent Technologies (Spain)
Carlos Mateos, Lucent Technologies (Spain)
Gerardo Gonzalez, Lucent Technologies (Spain)
Sergio Cruceta, Lucent Technologies (Spain)
J. Castano, Lucent Technologies (Spain)

Published in SPIE Proceedings Vol. 4182:
Process Control and Diagnostics
Michael L. Miller; Kaihan A. Ashtiani, Editor(s)

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