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Proceedings Paper

Characterization of optical storage media films by time-of-flight-energy elastic recoil detection analysis
Author(s): Yanwen Zhang; Goran Possnert; Lars Jonsson; Thomas Winzell; Harry J. Whitlow
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Paper Abstract

The challenge of meeting the ever increasing demands for low-cost information storage media with greater information storage density and rapid access has prompted development of sophisticated optical technologies, e.g. CD (Compact Disc) and DVD (Digital Video Disc) in Read Only (ROM), Recordable (R), Re-writable (RW) and Random Access Memory (RAM). Here the suitability of Time of Flight-Energy Elastic Recoil Detection Analysis (ToF-E ERDA) to characterize optical storage media has been investigated. High-energy heavy ions (48 MeV 81Br8+ and 60 MeV 127I10+) from an accelerator were used to analyze CD-ROM, CD-R and CD-RW structures. Simultaneous characterization of H, C, O, Al, P, Co, Cr, Ge, Sb/Te could be made. The results demonstrate the unique power of the technique for characterizing the structure and depth profile of the optical multi-layers as well as the ingress and influence of foreign species.

Paper Details

Date Published: 29 November 2000
PDF: 4 pages
Proc. SPIE 4086, Fourth International Conference on Thin Film Physics and Applications, (29 November 2000); doi: 10.1117/12.408426
Show Author Affiliations
Yanwen Zhang, Uppsala Univ. (Sweden)
Goran Possnert, Uppsala Univ. (Sweden)
Lars Jonsson, M2 Engineering AB (Sweden)
Thomas Winzell, Lund Institute of Technology (Sweden)
Harry J. Whitlow, Lund Institute of Technology (Sweden)

Published in SPIE Proceedings Vol. 4086:
Fourth International Conference on Thin Film Physics and Applications
Junhao Chu; Pulin Liu; Yong Chang, Editor(s)

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