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Proceedings Paper

High-throughput micromachining of steel and ceramics with solid state UV laser
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Paper Abstract

Performance limits of 10 kHz, 15 nsec-pulse diode-pumped solid- state laser in microdrilling of metals and ceramics were studied. Average drilling rates approaching 1 cm/sec with micrometer-range accuracy of micro-holes are achievable in steel and ceramic samples up to 1 mm thick. We found that shielding effects of plasma plume can be minimized by proper selection of laser intensity. In samples 1 mm and thicker, using third harmonic output allows drilling of high aspect ratio holes at almost an order of magnitude higher ablation rates as compared to IR laser output.

Paper Details

Date Published: 16 August 2000
PDF: 11 pages
Proc. SPIE 4065, High-Power Laser Ablation III, (16 August 2000); doi: 10.1117/12.407399
Show Author Affiliations
Sergei V. Govorkov, Lambda Physik, Inc. (United States)
Evgueni V. Slobodtchikov, Lambda Physik, Inc. (United States)
Alexander O. Wiessner, Lambda Physik, Inc. (United States)
Dirk Basting, Lambda Physik, Inc. (United States)

Published in SPIE Proceedings Vol. 4065:
High-Power Laser Ablation III
Claude R. Phipps, Editor(s)

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