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Proceedings Paper

Compact debris shutter design of a laser-produced plasma source for high-NA application
Author(s): Masaki Yamamoto; Minaji Furudate; Norio Sato; Hirochi Takagi
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Paper Abstract

A compact debris shutter for use with a laser produced plasma source is designed for installation to our EUV interferometer. The shutter is for operation under vacuum based on a gyroscope design for space satellites. It is of a hollow cylinder shape of 20 cm diameter enabling to stop debris of the plasma source traveling at a speed below 260 m/s at a spinning speed of 6000 rpm.

Paper Details

Date Published: 8 November 2000
PDF: 4 pages
Proc. SPIE 4146, Soft X-Ray and EUV Imaging Systems, (8 November 2000); doi: 10.1117/12.406664
Show Author Affiliations
Masaki Yamamoto, Tohoku Univ. (Japan)
Minaji Furudate, Tohoku Univ. (Japan)
Norio Sato, Mitsubishi Precision Co. Ltd. (Japan)
Hirochi Takagi, Mitsubishi Precision Co. Ltd. (Japan)

Published in SPIE Proceedings Vol. 4146:
Soft X-Ray and EUV Imaging Systems
Winfried M. Kaiser; Richard H. Stulen, Editor(s)

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