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Proceedings Paper

Capillary discharge plasmas as a source of EUV and soft x-ray radiation
Author(s): Alexander P. Shevelko; Larry V. Knight; Oleg F. Yakushev
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Paper Abstract

A compact device, based on fast capillary discharge plasmas, is used as an intense EUV and soft x-ray source of radiation. The plasma is created by a discharge of low-inductance capacitors (30 nF) through a capillary (2 mm diameter, 20 mm length). Two types of capillary are used: a polyacetal (empty) and a gas-filled (Ar, Xe). All components are assembled in a coaxial geometry. The total size of the device including capacitors, switch and capillary is 30 cm long and 25 cm in diameter. Discharge current is monitored using a shunt circuit.

Paper Details

Date Published: 2 November 2000
PDF: 8 pages
Proc. SPIE 4144, Advances in Laboratory-based X-Ray Sources and Optics, (2 November 2000); doi: 10.1117/12.405905
Show Author Affiliations
Alexander P. Shevelko, P.N. Lebedev Physical Institute (Russia)
Larry V. Knight, Brigham Young Univ. (United States)
Oleg F. Yakushev, P.N. Lebedev Physical Institute (Russia)

Published in SPIE Proceedings Vol. 4144:
Advances in Laboratory-based X-Ray Sources and Optics
Carolyn A. MacDonald; Ali M. Khounsary, Editor(s)

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