This paper presents a new micro-machining using optical radiation pressure induced by incident laser light, which is based on laser trapping technology. In order to verify the feasibility of our proposed new micro-machining, we construct the experimental system and carry out the fundamental experiments. As a result, we found that the proposed micro-machining will make it possible to remove effectively the surface up to the depth of several nm using the particles trapped by the optical radiation pressure, even if the pressure force is as small as 0.1nN.

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405733

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)