Share Email Print

Proceedings Paper

UV laser ablative shaping of optical surface using ArF laser
Author(s): Takahisa Jitsuno; Keiu Tokumura; Hisashi Tamamura
Format Member Price Non-Member Price
PDF $17.00 $21.00

Paper Abstract

A new scheme for phase control of optical components using laser ablation shaping (LAS) has been developed. The surface shape of optical plastic material coated on a glass plate is ablated using 193 nm laser light to control the transmission wave front. The surface shape is monitored in situ and corrected to attain the desired aberration level. The irradiation fluence is about 40 mJ/cm2, and the ablation depth per pulse is about 0.01 micrometers per pulse for UV-cured resin. A wave front aberration of 3.0(lambda) is reduced to 0.17(lambda) in the case of flat surface shaping. In the case of spherical surface generation, an aberration of 2.5(lambda) is reduced to 0.2(lambda) . Increase in surface roughness is kept within the acceptable levels. This scheme has been applied to the fabrication of micro-optical elements for the collimation of laser diode (LD) or single mode optical fiber (SMF). In the case of LD lens, micro- collimate lens was placed at the output surface of LD, and the wave-front error was measured with Shack Hrtmass wave- front sensor. In the case of SMF, small lens was formed directly at the output surface with UV-cured resin. The laser beam was focused to 250 micrometers in radius for micro- fabrication. The wave-front distortion was decreased from about 15(lambda) to less than 2(lambda) in mm size lens.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405709
Show Author Affiliations
Takahisa Jitsuno, Osaka Univ. (Japan)
Keiu Tokumura, Nalux Co., Ltd. (Japan)
Hisashi Tamamura, Sony/Tektronix Corp. (Japan)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

© SPIE. Terms of Use
Back to Top
Sign in to read the full article
Create a free SPIE account to get access to
premium articles and original research
Forgot your username?