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Proceedings Paper

Micromachining using femtosecond lasers
Author(s): Hans Kurt Toenshoff; Andreas Ostendorf; Stefan Nolte; Frank Korte; Thorsten Bauer
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Paper Abstract

Femtosecond laser systems have been proved to be effective tools for high precision micro-machining. Almost all solid materials can be processed with high precision. The dependence on material properties like thermal conductivity, transparency, heat- or shock sensitivity is strongly reduced and no significant influence on the remaining bulk material is observed after ablation using femtosecond laser pulses. In contrast to conventional laser processing, where the achievable precision is reduced due to a formed liquid phase causing burr formation, the achievable precision using femtosecond pulses is only limited by the diffraction of the used optics. Potential applications of this technique, a\including the structuring of biodegradable polymers for cardiovascular implants, so-called stents, as well as high precision machining of transparent materials are presented.

Paper Details

Date Published: 6 November 2000
PDF: 4 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405700
Show Author Affiliations
Hans Kurt Toenshoff, Laser Zentrum Hannover e.V. (Germany)
Andreas Ostendorf, Laser Zentrum Hannover e.V. (Germany)
Stefan Nolte, Laser Zentrum Hannover e.V. (Germany)
Frank Korte, Laser Zentrum Hannover e.V. (Germany)
Thorsten Bauer, Laser Zentrum Hannover e.V. (Germany)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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