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Proceedings Paper

Overview of laser microprocessing: fundamentals, practical applications, and future prospects
Author(s): Vadim P. Veiko
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Paper Abstract

Today the laser technologies are widely used in the processing of materials, including also the precise micro shaping. Deep UV lasers have very good prospects in the lithography, used for fabrication of chips, while the femtosecond pused lasers open the new horizons for the micro- and submicroprofiling. But these are the field of the future prospects. As for today state-of-the-art, contribution to the application of lasers for these purposes are the numerous advantages of the laser techniques over the traditional methods, such as: - wide variety of materials to be treated, - possibility of achieving narrow cuts and practically waste-fee separation, - small heat-affected zone, - minimal mechanical effect and minimum thermal deformations, - possibility of micro shaping along a complex profile in two, or even three, dimensions, - possibility of fast and precise process switch-on and off and to include in the processing feedback on the treated parameters.

Paper Details

Date Published: 6 November 2000
PDF: 8 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405694
Show Author Affiliations
Vadim P. Veiko, St. Petersburg Institute of Fine Mechanics and Optics (Russia)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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