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Proceedings Paper

Laser-induced microstructuring of photonic materials: semiconductors
Author(s): Jan J. Dubowski
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Paper Abstract

The laser has become an increasingly important tool, which helps to overcome the limitations of conventional microfabrication technologies, delivering devices capable of performing new and increased numbers of operations within an ever shrinking volume. In addition to classical applications of lasers such as via hold drilling, trimming or pulsed laser deposition of thin films, there have been new developments in laser-based technologies for the fabrication of advanced micro- and nano-devices. Of particular interest for optoelectronic and photonic applications is the potential for commercial processing of semiconductors and the fabrication of integrated and monolithically integrated photonic devices and circuits.

Paper Details

Date Published: 6 November 2000
PDF: 9 pages
Proc. SPIE 4088, First International Symposium on Laser Precision Microfabrication, (6 November 2000); doi: 10.1117/12.405689
Show Author Affiliations
Jan J. Dubowski, National Research Council of Canada (Canada)

Published in SPIE Proceedings Vol. 4088:
First International Symposium on Laser Precision Microfabrication
Isamu Miyamoto; Koji Sugioka; Thomas W. Sigmon, Editor(s)

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