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Proceedings Paper

CAD modeling of scratch drive actuation
Author(s): Nora Finch; James Marchetti; Hiroyuki Fujita; Jean-Philippe Gouy
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Paper Abstract

Assembled MEMS structures provide a unique design opportunity by overcoming the inherent planarity of the MEMS fabrication process, allowing for added flexibility and new application areas. However, post-process assembly of these devices is frequently problematic. Force and displacement controls are often imprecise at the microscale resulting in damage to the device. In contrast, self-assembling MEMS structures can avoid external manipulation and therefore can be less likely to suffer damage. Self-assembly, though, requires the added complexity of integrated actuation.

Paper Details

Date Published: 24 October 2000
PDF: 7 pages
Proc. SPIE 4228, Design, Modeling, and Simulation in Microelectronics, (24 October 2000); doi: 10.1117/12.405398
Show Author Affiliations
Nora Finch, IntelliSense Corp. (United States)
James Marchetti, IntelliSense Corp. (United States)
Hiroyuki Fujita, Univ. of Tokyo (Japan)
Jean-Philippe Gouy, Univ. of Tokyo (Japan)

Published in SPIE Proceedings Vol. 4228:
Design, Modeling, and Simulation in Microelectronics
Bernard Courtois; Serge N. Demidenko; Lee Y. Lau, Editor(s)

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