Proceedings Paper
Frequency tunable micromachined rf oscillators| Format | Member Price | Non-Member Price |
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Paper Abstract
High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significant factor in affecting the flat passband of the filter and will be further analyzed in this paper.
Paper Details
Date Published: 20 October 2000
PDF: 8 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404898
Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication
Kevin H. Chau; M. Parameswaran; Francis E.H. Tay, Editor(s)
PDF: 8 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404898
Show Author Affiliations
Yee Chong Loke, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Kim Miao Liew, Nanyang Technological Univ. (Singapore)
Q. Zou, Univ. of Hawaii/Manoa (United States)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication
Kevin H. Chau; M. Parameswaran; Francis E.H. Tay, Editor(s)
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