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Proceedings Paper

MEMS atomizer based on Rayleigh instability-driven breakup of filaments
Author(s): Yen-Peng Kong; Francis E.H. Tay; Yuan Xu
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Paper Abstract

In this paper, simulation studies to determine the feasibility of producing filaments using `drop and demand' techniques are presented. These filaments will break up into droplets due to the phenomena caused by Rayleigh instability. In the biomedical applications, for effective pulmonary drug delivery of insulin, for example, the drug particles must be in the range of 1 to 5 microns in size. This stringent requirement is also encountered in gas flow seeding for Laser Doppler Velocimetry studies. A piezoelectrically actuated MEMS atomizer based on Rayleigh instability-driven break-up of filaments has been designed to meet this requirement. Although the formation of droplets from jets has been used extensively in ink-jet printing, the currently presented mode of droplet formulation has yet to be demonstrated in a MEMS device.

Paper Details

Date Published: 20 October 2000
PDF: 11 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404890
Show Author Affiliations
Yen-Peng Kong, Institute of Materials Research and Engineering (Singapore)
Francis E.H. Tay, National Univ. of Singapore (Singapore)
Yuan Xu, Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication
Kevin H. Chau; M. Parameswaran; Francis E.H. Tay, Editor(s)

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