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Proceedings Paper

Novel self-oscillating anemometer with capacitance-based sensing
Author(s): Yen-Peng Kong; Francis E.H. Tay; Yuan Xu
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Paper Abstract

In this paper, the feasibility of a self-oscillating anemometer is examined. A 2D numerical study of a novel self-oscillating anemometer that can be fabricated using micromachining techniques is performed. The device is essentially a square cylinder suspended in the fluid flow by a fixed beam. The flow velocity can be easily measured by determining the frequency of oscillation obtained from capacitance sensing. Anemometer with different length scales can be fabricated to enable different ranges of velocities to be measured.

Paper Details

Date Published: 20 October 2000
PDF: 5 pages
Proc. SPIE 4230, Micromachining and Microfabrication, (20 October 2000); doi: 10.1117/12.404889
Show Author Affiliations
Yen-Peng Kong, Institute of Materials Research and Engineering (Singapore)
Francis E.H. Tay, National Univ. of Singapore (Singapore)
Yuan Xu, Institute of Materials Research and Engineering (Singapore)

Published in SPIE Proceedings Vol. 4230:
Micromachining and Microfabrication
Kevin H. Chau; M. Parameswaran; Francis E.H. Tay, Editor(s)

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