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Proceedings Paper

Three-dimensional laser inverse scattering phase method for evaluating microstructure
Author(s): Yasuhiro Takaya; Atsushi Taguchi; Satoru Takahashi; Takashi Miyoshi
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Paper Abstract

The 3D laser inverse scattering phase method offers the advantage of measuring a 3D microprofile within the whole area illuminated by laser beam at one time. No scanning process is required as you see in SPM (Scanning Probe Microscope). So, this method finds application where the in-process measurement of a 3D microprofile with accuracy in the nanometer order is required for the process error evaluation. The work reported in this paper deals with development of a new iterative Fourier phase retrieval algorithm based on practical object-domain constraints and actual measurements of a NIST traceable surface topography reference with rectangular pockets 44nm deep at intervals of 10micrometers . The results obtained in the measurements show the validity of the newly developed laser inverse scattering phase method.

Paper Details

Date Published: 10 October 2000
PDF: 4 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403851
Show Author Affiliations
Yasuhiro Takaya, Osaka Univ. (Japan)
Atsushi Taguchi, Osaka Univ. (Japan)
Satoru Takahashi, Osaka Univ. (Japan)
Takashi Miyoshi, Osaka Univ. (Japan)

Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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