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Proceedings Paper

Novel high-resolution vibration sensor based on laser frequency splitting technology
Author(s): Yi Zhang; Shulian Zhang
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Paper Abstract

The prototype of a novel high resolution vibration sensor based on HeNe laser frequency splitting technology is presented in this paper and the results of a series of experiments are reported. A seismic inertial structure has been developed to realize the absolute measurement. The parameters of the inertial structure can be selected to be suitable for different vibration frequency bands and different sensitivities. In the experiments the highest resolution of 15nm on the measurement of vibration amplitudes are obtained. The sensor has a good potential perspective to be applied in the high-resolution and high- sensitivity, low or middle frequency vibration measurements.

Paper Details

Date Published: 10 October 2000
PDF: 5 pages
Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403845
Show Author Affiliations
Yi Zhang, Tsinghua Univ. (China)
Shulian Zhang, Tsinghua Univ. (China)

Published in SPIE Proceedings Vol. 4222:
Process Control and Inspection for Industry
Shulian Zhang; Wei Gao, Editor(s)

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