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Proceedings Paper

Micro/nanofactory: concept and state of the art
Author(s): Jean-Marc Breguet; Carl Schmitt; Reymond Clavel
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Paper Abstract

A Microfactory is a set of cooperating micro-machines dedicated to the production of Microsystems in small to medium quantities. This paper describes the Microfactory concept currently developed at the Institut de Systemes Robotiques (ISR). A state of the art in this domain is presented. Several novel designs on micro-positioning systems are discussed. Emphasis is put on piezo-actuators with nanometer resolution and large workspaces (few cm3). Finally, our vision for the future trends in the field of Microfactory is briefly introduced.

Paper Details

Date Published: 11 October 2000
PDF: 12 pages
Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); doi: 10.1117/12.403687
Show Author Affiliations
Jean-Marc Breguet, Swiss Federal Institute of Technology/Lausanne (Switzerland)
Carl Schmitt, Swiss Federal Institute of Technology/Lausanne (Switzerland)
Reymond Clavel, Swiss Federal Institute of Technology/Lausanne (Switzerland)

Published in SPIE Proceedings Vol. 4194:
Microrobotics and Microassembly II
Bradley J. Nelson; Jean-Marc Breguet, Editor(s)

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